Deep Learning-Based Defect Classification and Detection in SEM Images

20 June 2022

Papers citing "Deep Learning-Based Defect Classification and Detection in SEM Images"

4 / 4 papers shown

Title
Defect Detection in Photolithographic Patterns Using Deep Learning Models Trained on Synthetic Data Prashant P. Shinde Priyadarshini P. Pai Shashishekar P. Adiga K. Subramanya Mayya Yongbeom Seo Myungsoo Hwang Heeyoung Go C. P 44 0 0 15 May 2025
Improved Defect Detection and Classification Method for Advanced IC Nodes by Using Slicing Aided Hyper Inference with Refinement Strategy V. D. Ridder Bappaditya Dey Victor Blanco Sandip Halder B. Waeyenberge 17 3 0 19 Nov 2023
SEMI-PointRend: Improved Semiconductor Wafer Defect Classification and Segmentation as Rendering MinJin Hwang Bappaditya Dey Enrique Dehaerne S. Halder Young-han Shin ISeg 3DPC 19 10 0 19 Feb 2023
Optimizing YOLOv7 for Semiconductor Defect Detection Enrique Dehaerne Bappaditya Dey S. Halder S. de Gendt 30 16 0 19 Feb 2023