Intelligent OPC Engineer Assistant for Semiconductor Manufacturing

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Intelligent OPC Engineer Assistant for Semiconductor Manufacturing

23 August 2024

Bei Yu

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Papers citing "Intelligent OPC Engineer Assistant for Semiconductor Manufacturing"

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Title
ILILT: Implicit Learning of Inverse Lithography Technologies Haoyu Yang Haoxing Ren 62 3 0 06 May 2024
CAMO: Correlation-Aware Mask Optimization with Modulated Reinforcement Learning Xiaoxiao Liang Haoyu Yang Kang Liu Bei Yu Yuzhe Ma 21 2 0 01 Apr 2024
ChipNeMo: Domain-Adapted LLMs for Chip Design Mingjie Liu Teodor-Dumitru Ene Robert M. Kirby Chris Cheng N. Pinckney ... Pratik P Suthar Varun Tej Walker J. Turner Kaizhe Xu Haoxin Ren 140 163 0 31 Oct 2023
Large Language Models can Learn Rules Zhaocheng Zhu Yuan Xue Xinyun Chen Denny Zhou Jian Tang Dale Schuurmans Hanjun Dai LRM ReLM 95 70 0 10 Oct 2023
ChatGPT Outperforms Crowd-Workers for Text-Annotation Tasks Fabrizio Gilardi Meysam Alizadeh M. Kubli AI4MH 118 926 0 27 Mar 2023
Large Language Models are Zero-Shot Reasoners Takeshi Kojima S. Gu Machel Reid Yutaka Matsuo Yusuke Iwasawa ReLM LRM 532 4,522 0 24 May 2022
Language Models are Few-Shot Learners Tom B. Brown Benjamin Mann Nick Ryder Melanie Subbiah Jared Kaplan ... Christopher Berner Sam McCandlish Alec Radford Ilya Sutskever Dario Amodei BDL 892 42,463 0 28 May 2020
Proximal Policy Optimization Algorithms John Schulman Filip Wolski Prafulla Dhariwal Alec Radford Oleg Klimov OffRL 553 19,296 0 20 Jul 2017