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2408.08969
Cited By
Differentiable Edge-based OPC
16 August 2024
Guojin Chen
Haoyu Yang
Haoxing Ren
Bei Yu
David Z. Pan
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Papers citing
"Differentiable Edge-based OPC"
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Title
AdaOPC: A Self-Adaptive Mask Optimization Framework For Real Design Patterns
Wenqian Zhao
Xufeng Yao
Ziyang Yu
Guojin Chen
Yuzhe Ma
Bei Yu
Martin D. F. Wong
30
17
0
15 Mar 2023
1
