Improved Defect Detection and Classification Method for Advanced IC Nodes by Using Slicing Aided Hyper Inference with Refinement Strategy

19 November 2023

Papers citing "Improved Defect Detection and Classification Method for Advanced IC Nodes by Using Slicing Aided Hyper Inference with Refinement Strategy"

1 / 1 papers shown

Title
Defect Detection in Photolithographic Patterns Using Deep Learning Models Trained on Synthetic Data Prashant P. Shinde Priyadarshini P. Pai Shashishekar P. Adiga K. Subramanya Mayya Yongbeom Seo Myungsoo Hwang Heeyoung Go C. P 27 0 0 15 May 2025