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Automated Semiconductor Defect Inspection in Scanning Electron Microscope Images: a Systematic Review

16 August 2023

Papers citing "Automated Semiconductor Defect Inspection in Scanning Electron Microscope Images: a Systematic Review"

22 / 22 papers shown

Title
Deep Learning based Defect classification and detection in SEM images: A Mask R-CNN approach Bappaditya Dey Enrique Dehaerne Kasem Khalil S. Halder Philippe Leray Magdy A. Bayoumi 44 16 0 03 Nov 2022
Deep Learning-Based Defect Classification and Detection in SEM Images Bappaditya Dey Dipam Goswami S. Halder Kasem Khalil Philippe Leray Magdy A. Bayoumi 42 30 0 20 Jun 2022
A ConvNet for the 2020s Zhuang Liu Hanzi Mao Chaozheng Wu Christoph Feichtenhofer Trevor Darrell Saining Xie ViT 186 5,213 0 10 Jan 2022
FastFlow: Unsupervised Anomaly Detection and Localization via 2D Normalizing Flows Jiawei Yu1 Ye Zheng Xiang Wang Wei Li Yushuang Wu Rui Zhao Liwei Wu 65 312 0 15 Nov 2021
CFLOW-AD: Real-Time Unsupervised Anomaly Detection with Localization via Conditional Normalizing Flows Denis A. Gudovskiy Shun Ishizaka Kazuki Kozuka 112 404 0 27 Jul 2021
FSCE: Few-Shot Object Detection via Contrastive Proposal Encoding Bo Sun Banghuai Li Shengcai Cai Ye Yuan Chi Zhang 113 376 0 10 Mar 2021
PaDiM: a Patch Distribution Modeling Framework for Anomaly Detection and Localization Thomas Defard Aleksandr Setkov Angélique Loesch Romaric Audigier UQCV 79 847 0 17 Nov 2020
WeMix: How to Better Utilize Data Augmentation Yi Tian Xu Asaf Noy Ming Lin Qi Qian Hao Li Rong Jin 70 16 0 03 Oct 2020
A Simple Semi-Supervised Learning Framework for Object Detection Kihyuk Sohn Zizhao Zhang Chun-Liang Li Han Zhang Chen-Yu Lee Tomas Pfister 94 499 0 10 May 2020
Ensemble learning in CNN augmented with fully connected subnetworks Daiki Hirata Norikazu Takahashi OOD 41 26 0 19 Mar 2020
Stochastic Optimization of Plain Convolutional Neural Networks with Simple methods Yahia Saeed Assiri BDL 100 23 0 24 Jan 2020
Detecting and Simulating Artifacts in GAN Fake Images Xu-Yao Zhang Svebor Karaman Shih-Fu Chang 96 488 0 15 Jul 2019
Few-shot Object Detection via Feature Reweighting Bingyi Kang Zhuang Liu Xin Wang Feng Yu Jiashi Feng Trevor Darrell ObjD OffRL 96 699 0 05 Dec 2018
Mask R-CNN Kaiming He Georgia Gkioxari Piotr Dollár Ross B. Girshick ObjD 366 27,244 0 20 Mar 2017
Towards Principled Methods for Training Generative Adversarial Networks Martín Arjovsky M. Nault GAN 83 2,112 0 17 Jan 2017
YOLO9000: Better, Faster, Stronger Joseph Redmon Ali Farhadi VLM ObjD 183 15,633 0 25 Dec 2016
SSD: Single Shot MultiBox Detector Wen Liu Dragomir Anguelov D. Erhan Christian Szegedy Scott E. Reed Cheng-Yang Fu Alexander C. Berg ObjD BDL 246 29,871 0 08 Dec 2015
Rethinking the Inception Architecture for Computer Vision Christian Szegedy Vincent Vanhoucke Sergey Ioffe Jonathon Shlens Z. Wojna 3DV BDL 886 27,416 0 02 Dec 2015
You Only Look Once: Unified, Real-Time Object Detection Joseph Redmon S. Divvala Ross B. Girshick Ali Farhadi ObjD 721 37,020 0 08 Jun 2015
Fast R-CNN Ross B. Girshick ObjD 309 25,081 0 30 Apr 2015
Rich feature hierarchies for accurate object detection and semantic segmentation Ross B. Girshick Jeff Donahue Trevor Darrell Jitendra Malik ObjD 291 26,217 0 11 Nov 2013
SMOTE: Synthetic Minority Over-sampling Technique Nitesh Chawla Kevin W. Bowyer Lawrence Hall W. Kegelmeyer AI4TS 386 25,686 0 09 Jun 2011