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2301.08974
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Soft Sensing Regression Model: from Sensor to Wafer Metrology Forecasting
21 January 2023
An Fan
Yu Huang
Fei Xu
Sthitie Bom
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Papers citing
"Soft Sensing Regression Model: from Sensor to Wafer Metrology Forecasting"
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Title
Soft Sensing Transformer: Hundreds of Sensors are Worth a Single Word
Chao Zhang
Jaswanth K. Yella
Yu Huang
Xiaoye Qian
Sergei Petrov
A. Rzhetsky
Sthitie Bom
29
14
0
10 Nov 2021
1
