Generic Lithography Modeling with Dual-band Optics-Inspired Neural Networks

12 March 2022

Papers citing "Generic Lithography Modeling with Dual-band Optics-Inspired Neural Networks"

4 / 4 papers shown

Title
ILILT: Implicit Learning of Inverse Lithography Technologies Haoyu Yang Haoxing Ren 39 3 0 06 May 2024
An Adversarial Active Sampling-based Data Augmentation Framework for Manufacturable Chip Design Mingjie Liu Haoyu Yang Zong-Yi Li K. Sastry S. Mukhopadhyay Selim Dogru Anima Anandkumar David Z. Pan Brucek Khailany Haoxing Ren 46 3 0 27 Oct 2022
Physics-Informed Neural Operator for Learning Partial Differential Equations Zong-Yi Li Hongkai Zheng Nikola B. Kovachki David Jin Haoxuan Chen Burigede Liu Kamyar Azizzadenesheli Anima Anandkumar AI4CE 62 385 0 06 Nov 2021
Fourier Neural Operator for Parametric Partial Differential Equations Zong-Yi Li Nikola B. Kovachki Kamyar Azizzadenesheli Burigede Liu K. Bhattacharya Andrew M. Stuart Anima Anandkumar AI4CE 253 2,298 0 18 Oct 2020